Abstract
We developed a corona reactor, a new gas purifier without liquid nitrogen, to remove gaseous impurities from the excimer laser gas, because the impurities from the discharge affect the laser output power negatively. The electrodes of the corona reactor are arranged to co-axial construction, where a cylindrical tube is used as an anode electrode and a wire cathode is set at the center of the cylindrical anode.
This paper describes the experimental results of the corona reactor under the practical excimer laser operation. The corona reactor was run to efficienc tests for 6×108 shots of excimer laser pulses. During the long operation, the reactor removed the impurities well so that laser output power went down as little as the case of the conventional gas-purifier with liquid nitrogen. The electrical characteristics of the reactor showed no degradation during the experiments.
