Electron Collision Cross Sections for C₃F₈ Molecule from Electron Transport Coefficients in C₃F₈-Ar Mixtures

抄録

We measured the electron transport coefficients, the electron drift velocity W and the product of the gas number density and the longitudinal diffusion coefficient NDL, over the E/N range from 0.03 to 100 Td and gas pressure range from 0.133 to 122kPa in the 0.526% and 5.05% C₃F₈-Ar mixtures by the double shutter drift tube with variable drift distance.
We determined the electron collision cross sections for the C₃F₈ molecule by the comparison of the present measurement and the calculation of electron transport coefficients in the C₃F₈-Ar mixtures by using a multi-term Boltzmann equation analysis. Our special attention in the present study was focused upon the vibrational excitation cross sections of the C₃F₈ molecule.