IEEJ Transactions on Fundamentals and Materials
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
Axial Distribution of Electron Density in Capacitively Coupled RF Discharge Plasma
Hiroaki Tada, Joji Maeda, Tadashi Terada, Sumio Kogoshi
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1998 Volume 118 Issue 7-8 Pages 897-898

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