Characteristics of Laser Plasma Plume from Graphite Target Ablation Using KrF Excimer Laser

Abstract

We have optically studied the dynamics of the plasma plume during preparation of diamondlike carbon (DLC) thin films andcarbon nitride (CNx) thin films by the pulsed laser deposition method. We report on spectroscopic properties of laser plasma plumeproduced during the DLC and CNx thin film deposition. It was found that carbon atoms and ions emitted from the target react withambient gases of hydrogen and nitrogen. CH and CN molecules are formed in the gas phase. The properties of DLC and CNx thinfilms are strongly affected by the laser plume dynamics. Some conversion mechanism of C₂ radical to CN radical probably exists.