IEEJ Transactions on Fundamentals and Materials
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
Ion Energy Measurement in Shielded Vacuum Arc with Graphite Cathode
Ryuichi Miyano, Makoto Nagayama, Hirofumi Takikawa, Tateki Sakakibara
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Keywords: cathodic arc, graphite cathode, ion mass spectrum, ion energy, diamond-like carbon film
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2000 Volume 120 Issue 6 Pages 724-725

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