IEEJ Transactions on Fundamentals and Materials
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
Control of Electron Density Hysteresis in Inductively Coupled RF Discharge Plasma by Adding Magnetic Field
Minoru Matsuura, Takayuki Suzuki, Sumio Kogoshi
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2000 Volume 120 Issue 8-9 Pages 845-846

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