三角格子状極配置サーフェスモータの位置制御

抄録

Recently, as for the machine tools or industrial robots, high performance, accuracy, etc. are demanded. Generally, when drive of many degrees of freedom is required in the machine tools or industrial robots, it has realized by using two or more motors. For example, two-dimensional positioning stages such as the X-Y plotter or the X-Y stage are enabling the two-dimensional drive by using each one motor in the direction of x, y. In order to use plural motors, these, however, have problems that equipment becomes large and complicate control system. From such problems, the Surface Motor (SFM) that can drive two directions by only one motor is researched. Authors have proposed SFM that considered wide range movement and the application to a curved surface. In this paper, the characteristics of the micro step drive by the open loop control are showed. Introduction of closed loop control for highly accurate positioning, moreover, is examined. The drive characteristics by each control are compared.