CTCSS (Cluster Tool Controller Software System): The Flexible Control System for the Cluster Structured Semiconductor Processing Equipment

Abstract

The semiconductor manufacturing industry has continued drastic growth with frequent change of the process technology. The control system for the SPE (Semiconductor Processing Equipment) requires flexibility for the change of the process equipment and prompt installation. We have developed the CTCSS (Cluster Tool Controller Software System) that could realize flexible restructure of the system by the mediation function between the cluster tool controller (CTC) and distributed lower level process module controllers (PMC). In the framework of CTCSS it is possible for existing CTC to reconstruct control system without detailed information of PMC. It has proved that by the methodology of CTCSS we can make the flexible control system for SPE and delivery could be made half.