Abstract
In recent years, high-precision and high-resolution encoders are expected for a nanotechnology control system. High-precision angle calibration apparatuses are required and hence, they have been developed according to industry expectations. The accuracy of the disk and angle sensor were calibrated with high precision using the same accuracy measurement system, and a high-precision angle sensor was achieved. Using the high-precision angle calibration system, the encoder was realized with a high level of wide accuracy of 0.2 seconds. In addition, a high-resolution angle sensor with 30-bit could be achieved, and the multi-functional angle sensor which have acceleration data and bus-communications for servo system was developed. The principle by which the angle sensor calibrates the accuracy by it-self has been developed. The base technology of applying an angle sensor to a nanotechnology system was established.
