IEEJ Transactions on Industry Applications
Online ISSN : 1348-8163
Print ISSN : 0913-6339
ISSN-L : 0913-6339
Paper
Magnetic Levitated 2D Fast Drive
Iñigo EtxanizAlberto IzpizuaManex San MartinJoseba Arana
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2006 Volume 126 Issue 12 Pages 1678-1681

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Abstract

This paper presents the design and implementation of a two dimensional drive. The moving part of the system is free of any contact and wires. The lightness of the moving part along with the big forces the 2D drive is capable to provide, makes feasible to obtain great accelerations. It has a compact sensoring system, and protected in a way that any colisions will not damage its important parts. The table has a traverse of 160mm in an axe and 125mm in the other one. A resolution of 0.02μm is obtained in each of the moving axes.

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© 2006 by the Institute of Electrical Engineers of Japan
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