A Friction Compensation Method in Positioning Control of Nonresonant Ultrasonic Actuator-Driven Precise Stage

Abstract

This research has aimed at the control system development of a non-resonant ultrasonic motor (SPIDER)-driven precision stage. SPIDER is newly developed as an actuator to achieve the positioning performance required for next generation. In this paper, friction compensation is firstly realized considering integral effect of controllers. Next, the compensation is achieved based on the adaptive friction observer. Moreover it is experimentally verified that the stick-slip phenomenon is prevented for an environmental change by the proposal technique, and a quick positioning in the scale resolution becomes possible.