Abstract
This paper presents a feedforward compensation approach for nonlinear disturbances in ball-screw-driven table positioning systems. The compensator design is focussed on minimizing the effects of nonlinear disturbances on positioning performance. This is achieved through the use of a mathematical model of precise micrometer disturbance characteristics produced by nonlinear spring behaviors during inching and reciprocating motions. Based on this model, a feedfoward disturbance compensation is applied to improve the disturbance suppression capability. The effectiveness of the proposed positioning control approach has been verified by experiments using a table drive system on a machine stand.
