Abstract
Ultrasonic motors (USM) causes serious characteristic changes during operation. It is difficult for the conventional internal model control (IMC) proportional integral differential (PID) control to compensate such characteristic changes of the plant. To solve these problems, we propose a method of variable gain type IMC-PID control. In the proposed method, plant parameters are identified on line and these estimated parameters are used for adjusting three gains of PID. Then the proposed method makes it possible to compensate characteristic changes of the plant. The effectiveness of the proposed control method have been confirmed by experiments using the existing ultrasonic motors servo system.
