Nanoscale Servo Control for Galvano Scanner Using Final-State Control

Abstract

This paper proposes a new design method of nanoscale servo control for a Galvano scanner by using FFSC (frequency-shaped final-state control) method. In the Galvano scanner, it is important to reduce the residual vibration after positioning; further, this scanner must be robust to the variation of the resonance modes of the plant. In this paper, a feedforward input is designed by using FFSC by considering not only nominal performance but also robust performance. Simulations and experimental results are shown to evaluate the effectiveness of the proposed method.