Dynamic Analysis of 3 DOF Actuator Employing 3 D Finite Element Method

Abstract

This paper describes the dynamic analysis method of a three degree-of-freedom electromagnetic spherical actuator considering the mutual effect among X-, Y- and Z-axis employing the 3-D finite element method, in which the magnetic field equation is fully combined with equations of electric circuit and motion. The validity of the analysis is confirmed by comparing with the measured results on a prototype.