Tracking Control of an XY Stage by Considering Suppression of Machine-Stand Vibration

Abstract

Machine tools require XY stages that can be quickly and accurately controlled. However, when an XY stage is moved at a high speed, machine stand vibrates because of the reaction force of the actuator, and this vibration decreases the positioning accuracy. In this paper, we propose a control method based on ZPETC and used a peak filter to achieve quick and accurate tracking control. The effectiveness of the proposed method is verified by performing a simulation and experiment.