抄録
This paper presents a performance improvement of trajectory tracking for the fast-response and high-precision positioning by a sequential adaptive compensation for disturbance. A mathematical disturbance model formulated and parameterized by an iterative learning process can estimate the actual disturbance, and the model can be sequentially adapted by a recursive least-squares method so that it shows the adaptive property against disturbance variations. The proposed positioning control approach involving disturbance modeling and compensation has been verified by experiments using a linear motor-driven table system.