Feedfoward Input Design Method for Galvano Scanner Considering Mirror Vibration in Inclined Direction Relative to the Rotation Axis

Abstract

Galvano scanners are used as laser beam scanners in laser drilling machines. The mirror of the galvano scanner has vibration modes not only in a rotational direction but also in an inclined direction. Vibration in an inclined direction causes an error in the positioning of the laser spot in the direction perpendicular to the position. In multiple steps of motion, vibration is excited by an unbalanced moment of the mirror, thus degrading the positional accuracy. This paper proposes a feedforward input design method to reduce vibration in the inclined direction. The effectiveness of the proposed method is shown by simulation.