IEEJ Transactions on Industry Applications
Online ISSN : 1348-8163
Print ISSN : 0913-6339
ISSN-L : 0913-6339
Characterization of Glow Discharge α-Si: H Films by Time-of-Flight Measurement
Comparative Study of Monosilane and Disilane Films
Junji Shirafuji, Reiji Hattori, Kazuhiro Shirakawa
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1988 Volume 108 Issue 2 Pages 110-116

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