Abstract
Linear pulse motor (LPM) can be directly driven by the digital signals. However, a high accuracy positioning system using LPM needs fine position information for feedback signal. There are the optical displacement sensors, the magnetic displacement sensors and so on that detect the position of LPM mover. But no sensors satisfy all demands, size, simplification and severe environment. So we developed the linear sensor using meander coils. A meander coil is studied for miniature size inductor, micro-transformer and so on. Since the linear sensor using meander coils detects the magnetic pole tooth of LPM stator as a scale, the position detecting system will be made of miniature size. Furthermore, the system can be expected the high speed response, because the exciting current frequency of meander coils is megahertz order.
In this paper we describe the following contents.
(1) The principle operation and the construction of developed linear sensor using meander coils.
(2) The output voltage characteristics of the linear sensor using meander coils, and optimum exciting frequency of coils.
(3) Measuring displacement errors of the linear sensor using meander coils, and analyzing the errors.
