IEEJ Transactions on Industry Applications
Online ISSN : 1348-8163
Print ISSN : 0913-6339
ISSN-L : 0913-6339
NONCONTACT SUSPENDING AND TRANSPORTING PLANAR OBJECTS BY USING ACOUSTIC LEVITATION
Yoshiki Hashimoto, Yoshikazu Koike, Sadayuki Ueha
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Keywords: acoustic levitation, ultrasonic, vibration plate, transportation, non-contact
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1997 Volume 117 Issue 11 Pages 1406-1407

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