Abstract
High-precision stages are industrial equipment used in micro-fabrications. Fast and precise positioning control is a very important technology for improving the throughput and the product quality. In particular, a large-scale stage has a low resonance mode which disturbs fast and precise positioning because of the structures of the stage. In this paper, a novel feedback system is proposed in a SIMO system using multiple position sensors which are located at an actuator side and a load side. The proposed feedback system has two remarkable features. One is that the effect of the vibration suppression and the phase stabilization of the resonance mode can be tuned simultaneously with only two parameters. The other is that the tuning of the resonance mode does not affect the rigid mode at all. Finally, simulations and experiments with an XY-gantry-stage are performed to demonstrate the advantages of the proposed feedback control system.
