IEEJ Journal of Industry Applications
Online ISSN : 2187-1108
Print ISSN : 2187-1094
ISSN-L : 2187-1094
Special Issue Paper
Decoupling Control Method for High-Precision Stages using Multiple Actuators considering the Misalignment among the Actuation Point, Center of Gravity, and Center of Rotation
Wataru OhnishiHiroshi FujimotoKoichi SakataKazuhiro SuzukiKazuaki Saiki
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2016 Volume 5 Issue 2 Pages 141-147


High-precision stages are widely used in the semiconductor and flat panel industries. Because six degrees of freedom have to be controlled in these stages, coupling forces can degrade their control performance and stability. This paper proposes a decoupling control method from the scanning motion x to the pithing motion θy using multiple actuators considering the misalignment of the actuation point, the center of gravity (CoG), and the center of rotation (CoR). The method proposed in this paper consists of three steps: 1) a detailed modeling of the the scanning motion x and the pitching motion θy, 2) a changeable actuation point stage, and 3) an integrated design of mechanism and control. The validity of the proposed method is demonstrated by experiments.

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© 2016 The Institute of Electrical Engineers of Japan
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