The Journal of The Institute of Electrical Engineers of Japan
Online ISSN : 1881-4190
Print ISSN : 1340-5551
ISSN-L : 1340-5551
Technical Review
MEMS-type Ultrasound Transducer that Makes Ultrasound Examination Highly Accurate
Shuntaro MACHIDAHiroki TANAKA
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Keywords: MEMS, CMUT
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2020 Volume 140 Issue 6 Pages 368-371

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[in Japanese]
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© 2020 The Institute of Electrical Engineers of Japan
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