Power Micro-electromechanial Systems (Power MEMS)

Abstract

A power MEMS is a micro-electromechanical system to supply electric power or kinetic power. The power MEMS for electric power supply is attractive as a portable power source replacing batteries. State-of-the-art batteries suffer from insufficient energy and power density. The secondary battery needs time-consuming recharge at the place where a facility electric line is available. Moreover, recycling batteries is limited due to difficulties in balancing the cost and classifying many kinds of used batteries, although used batteries are accompanied with such problems as environmental pollution. The power MEMS is expected to realize new functions, such as high energy density, high power density, continuous operation without recharge and environmental friendliness, not found in batteries by using chemical fuels with energy density 1-2 digits higher than batteries or environmental energy. Another important application of the power MEMS is a micro-thruster for 1-10 kg class micro-spacecrafts. Currently, fuel cells, fuel reformers, combustion engine generators, combustion-based thermoelectric generators and thrusters are being miniaturized using MEMS technology. Also, ceramic micromachining for high-temperature power MEMS is under development.