IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Paper
The Development of Microchannel Chip Using Chemical Bonding Technique at Room Temperature
Akira YamaguchiHiroshi TsuchiyamaShigeki MatsuoJunichi YokoyamaHiroaki Misawa
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2002 Volume 122 Issue 3 Pages 172-178

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Abstract

Several bonding techniques for the development of microchannel chip at room temperature were studied. An electrostatic interaction between poly-ion layers with opposite charge and a condensation of silane coupling agent was employed to bond two glass substrates. In former case, the bonding of the substrates was achieved by applying high electrical potential. On the other hand, the condensation of silane coupling agent could bond the two glass substrates at room temperature and atmosphere. It was confirmed that the microchannel developed using the silane coupling agent could work for flow channel without solution leak. Poly(dimethylsiloxane)(PDMS) substrate was also applied for chip development. As a result, it was confirmed that PDMS was a material for easy and rapid fabrication of microchannel chip integrated with film electrodes

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© 2002 by the Institute of Electrical Engineers of Japan
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