Numerical Analysis for Evaluating Adhesion of Arbitrary-shaped Microstructures Using Optimization Method

Abstract

This paper discusses a method of analyzing the adhesion problem of arbitrary-shaped microstructures using FEM and an optimization. We have applied our method to square plates, and obtained realistic curved adhesion shapes. We fabricated square plates as test samples, and calculated γ_s of these samples by using our method. Adhesion criteria are also derived by numerical calculation. We then redesigned the adhesion samples by applying this method, and subsequent tests showed no adhesion of the samples.