IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Paper
Analysis of an Electrostatic Wobble Motor
Tadashi SonobeHiroyuki Fujita
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2003 Volume 123 Issue 10 Pages 442-447

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Abstract
Analysis of an electrostatic wobble motor is first strictly done by conformal mapping, especially by image method. Capacitances and torques calculated theoretically are in very good agreement with those calculated by FEM simulation, ANSYS, whose relative errors are within 1 %. Then, the effectiveness of detection of commutation timing is suggested by some numerical experiment based on this proposed analysis.
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© 2003 by the Institute of Electrical Engineers of Japan
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