Automatic Connection/Disconnection Mechanism of Microconnector

Abstract

A multiple distributed micromachine system is needed to cover a certain working area and fulfil the intended function. One system is chain-type micromachines for the inspection of the outer surfaces of tube banks. The task is carried out cooperatively by micromachines which assemble and are connected to each other at the desired tube. But the microconnectors have yet to be developed that let micromachines automatically join and separate with each other. We developed the microconnector with an automatic connection and disconnection mechanism. To miniaturize the magnetic actuator, sliding permanent magnet system is developed. The electrical terminals and guides are fabricated by deep X-ray lithography and electroforming (LIGA-like process). It is because the high accuracy and high aspect ratio is needed to realize the reliable connection and suppress the required actuator force. This paper gives connection/disconnection performance and electrical stability of microconnector