電子打ち込み増倍型光センサ

河合 克彦; 須山 本比呂

doi:10.1541/ieejsmas.123.529

Abstract

When accelerated electrons enter a semiconductor device, each of them produces thousands of electron-hole pairs. This electron-bombarded multiplication is successfully used to establish a photon sensor in conjunction with a photocathode emitting electrons. An operational principle of the electron-bombarded multiplication and performance of photon sensors adopted this technology are described.

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