A Silicon Micro Probe Array on a Flexible Substrate for Neural Recording

Abstract

In order to realize long-term stable multi-channel neural recording, a micro probe array based on a flexible polyimide substrate was designed and fabricated. Each probe was formed by etching a silicon wafer using a Deep RIE equipment. This type of flexible microelectrode can be attached around the soft nervous tissue. This paper shows the fabrication process and the analysis on the flexibility of the electrode to estimate the utility for the application to tissues (brain, nerve, retina, and so on).