Electro-Static Micro Actuator Technology for Moving Lens of Ultra Small Camera of Mobile Equipment

Abstract

A newly developed linear electrostatic microactuator is described. Thus far, authors have proposed an electrostatic linear microactuator with vibrating motion in order to avoid the influence of friction. Satisfactory characteristics are achieved for low energy consumption, output force, moving speed, and positional accuracy. Low energy consumption is especially to the fundamentals of applying an actuator to moving lens to mobile instruments. However, there are several difficulties for putting it into practical use. The fabrication cost is very high, and it is hard to produce in large quantities. To clear up these problems, a new actuator configuration and process for manufacturing is being developed. The moving part (slider) is sandwiched between the plate whose surface has many comb-electrodes and the plate whose surface has one filmy electrode. This mechanism is advantageous with regard to assembling stators. In this configuration, the distance between two stators is important, but the phase between them needs not to be arranged. The good characteristics of this project are low cost and mass production.