MEMS and Bio Nanotechnology

Abstract

Besides rapid commercialization, MEMS is contributing to expand scientific frontiers in nano-scale and bio technology. This paper first discuses how to combine MEMS technologies with bottom-up nano technologies in order to establish the scientific foundation and to construct engineered nano systems. The following part deals with MEMS tools for nano science and a bio actuated MEMS device. A pair of probes with 10-50 nm tip radius were micromachined with integrated microactuators for adjusting the distance between tips in micrometer range. The device was applied to obtain nano tweezers that handle DNA molecules. DNA molecules were captured between tips by electric field and retrieved from solution. Mechanical stretching and the observation in electron microscopes were performed. For bio assay of enzymes, MEMS chips with fL-chambers were fabricated in which the enzymatic product of F1-ATPase was evaluated in a single molecular level. Correlation between its rotational motion and the number of synthesized/consumed ATP molecules was measured. In addition, a conveyance device driven by bio motor molecules (microtubules and kinesin) was demonstrated.