Thermal Anemometer Using a Micro-Air-Bridge Heater

Abstract

We have developed a thermal anemometer with novel structures of micro-air-bridge heater and micro wind tunnel to regulate flow direction, which is fabricated by silicon micromachining technique. The features of sensor are low electrical power consumption and quick response. By using the sensor head with inclined package to flow direction, we have significantly improved the characteristics of the anemometer with a wind velocity up to 30m/s and a directionality of ±15 degree within an accuracy of 0.7%.