Three-dimensional micro-machining for fiber type optical control devices

Abstract

The well-controlled, complex three-dimensional fiber structures would be more useful as optical devices and sensors. Optical fiber micro-machining was attempted by combination of plasma etching and photolithography technology. In addition, a Ni plating technology and Ni stencil mask were introduced newly into fiber micro-machining. As the results, optical fibers with periodically stepped diameter or with micro-holes were realized and discussed as wavelength filter or transmitted light monitor.