2005 Volume 125 Issue 7 Pages 319-325
A micro-optical distance sensor by a combination of LIGA technology and Si micromachining is proposed. The function of the distance sensor is based on the triangulation principle. This sensor consists of optical components made by the LIGA process, i.e. a free space micro-optical system and micro-cylindrical lenses, and an electrical base with opto-electrical devices.
In this paper, two prototype sensors are described, which have measurement ranges of 1 mm (Type1) and 10mm (Type2). The dimensions of the pure sensor chip are 7 mm (W) × 7 mm (L) × 3 mm (H). The repeatability error of Type1 and Type2 are ±3 μm and ±80 μm, respectively.
IEEJ Transactions on Industry Applications
IEEJ Transactions on Electronics, Information and Systems
IEEJ Transactions on Power and Energy
IEEJ Transactions on Fundamentals and Materials
The Journal of The Institute of Electrical Engineers of Japan
The transactions of the Institute of Electrical Engineers of Japan.C
The transactions of the Institute of Electrical Engineers of Japan.B
The transactions of the Institute of Electrical Engineers of Japan.A
The Journal of the Institute of Electrical Engineers of Japan
