IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Paper
Composition Dependence of Gas Diffusion Membrane on Sensor Characteristics for Detection of Toxic Gases
Yoshitaka MizutaniHiroyuki MatsudaToru IshijiNagakazu Furuya
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2006 Volume 126 Issue 1 Pages 19-23

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Abstract
A superior electrochemical gas sensor has been developed by using a novel gas diffusion membrane consisting of carbon powder and poly-fluorocarbon for the detection of toxic gases. The gas permeability of the gas diffusion membrane depends on the poly-fluorocarbon composition in the membrane. With a decrease of the poly-fluorocarbon composition in the membrane, the electrochemical gas sensor shows high sensitivity for the detection of toxic gases, such as arsine and silane.
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© 2006 by the Institute of Electrical Engineers of Japan
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