IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Paper
Fabrication of Plastic Micro Tip Array using Laser Micromachining of Nanoparticles Dispersed Polymer and Micromolding
Hiromasa YagyuShigehiko HayashiOsamu Tabata
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JOURNAL FREE ACCESS

2006 Volume 126 Issue 1 Pages 7-13

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Abstract
An injection molded plastic micro tip array was fabricated. First, an inversed conical hole with a sharp tip and a high aspect ratio was fabricated by irradiating a low power output Nd:YVO4-SHG laser beam for several milliseconds on Au nanoparticles dispersed ethylcellulose. Then, an epoxy micro tip array was fabricated by the cast method using the inversed conical hole as a mother structure. This was followed by nickel electroforming to make a nickel-mold mother. Finally, plastic injection compression molding was carried out to form the final plastic micro tip array. By optimizing several processing parameters, a polyethylene micro tip array with a height of about 100 μm and a diameter of about 50 μm was successfully realized.
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© 2006 by the Institute of Electrical Engineers of Japan
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