Fabrication of Diaphragm Actuator using Bulk PZT

Abstract

Actuators that have a large driving force are necessary for use in micropumps and microvalves. These are produced by using PZT bulk ceramics having excellent piezoelectric properties together with Si single crystal. A novel fabrication process was proposed for bulk PZT microactuators. This process was composed with bonding a bulk PZT to a Si wafer, thinning the PZT down to several ten microns in thickness after bonding, micromachining of the thin PZT by an excimer laser, and Si micromachining such as reactive ion etching and anisotropic wet etching. A PZT-Si diaphragm structure was fabricated by this process, and successful operation of the diaphragm actuator was demonstrated.