Mirror Deformation by Piezoelectric Actuators

Fuminori Tanaka; Shigeo Maeda; Kenji Nagashima; Yoshiki Tsuchiya; Katsuhiko Tanaka; Akira Ishii; Susumu Sugiyama

doi:10.1541/ieejsmas.126.325

Abstract

Recently, MEMS devices are being studied for which the focus can be changed by moving a lens. Therefore, we propose a MEMS-based varifocal mirror in which piezoelectric actuators are used. In this study, we used micromachining to fabricate a varifocal mirror by bonding bulk PZT to Si single crystals, and then evaluated its performance.

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