IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Special Issue Paper
Design and Fabrication of Two-Stage-Driven Cantilever-Based RF MEMS Micro-Switch
Hironori TauchiKenichiro Suzuki
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2006 Volume 126 Issue 7 Pages 352-355

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Abstract
We have designed two kinds of cantilever MEMS switches based on two-stage driving. These micro-switches can mitigate tip-first-touching of the contact part and expected to have a long lifetime. Moreover, the driving voltage is low while keeping the device miniaturization. The RF characteristics of insertion loss and isolation are calculated and shown to be excellent. The micro-switches are fabricated by silicon deep dry etching using an SOI wafer and then electrostatic bonding onto a glass substrate. This process is fairly simple and confirmed to be able to fabricate two electrode gaps precisely.
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© 2006 by the Institute of Electrical Engineers of Japan
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