In-situ Measurement for Gas Concentrations using Tunable Lasers

Abstract

We have developed a high-sensitivity in-situ measurement technology that uses photons with an infrared wavelength band, as well as a systemization technology that demonstrates this measurement technology. More specifically, this measurement technology builds on a wavelength control technology and a wide-band photodetection technology whereby photons can be scanned over a broader wavelength range. With these technologies, gas concentrations can be measured with 1 ppb or higher sensitivity using absorption spectroscopy based on light-source wavelength based scanning in an infrared region.