Fabrication and Characterization of 3-DOF Soft-Contact Tactile Sensor Utilizing 3-DOF Micro Force Moment Sensor

Abstract

This paper presents the design, fabrication and characterization of a 3-DOF (3-degree of freedom) highly sensitive soft-contact tactile (SCT) sensor, which utilizes micro force moment sensing (MFMS) chip. The MFMS chip is working based on the piezoresistive effect in silicon. The MFMS chip has been packaged to produce 3-DOF SCT sensor, which has the contact part is made of silicone rubber. The sensor can independently detect three components of force (Fx', Fy', Fz') acting on the soft contact part of the sensor. The MFMS chip and the SCT sensor have been calibrated. The outputs were linear and the crosstalk was small.