Effect of NO₂ Gas Adsorption on Electrical Properties of Pyrolyzed Polymer

Abstract

This paper deals with a pyrolyzed polymer as a kind of carbon materials obtained by pyrolysis of polymers. Through a combination of micromachining of polymers and following pyrolysis process, we can obtain pyrolyzed polymer MEMS structures for various applications. This work focuses on the effect of NO₂ gas adsorption on electrical properties of pyrolyzed polymers. The resistance of the sensor is dramatically decreased when the sensor is exposed to the NO₂ gas. It is found that low pyrolysis temperature and high operating temperature contribute to higher sensitivity against gas mixture of NO₂.