Ultra Miniature Optical Fiber Pressure Sensor with a Sleeve for Catheter Insertion

Abstract

A diaphragm-type optical fiber pressure sensor, which has a sleeve for fiber insertion, is proposed and the fundamental characteristics of this sensor is demonstrated. The sleeve structure is fabricated by DRIE (Deep Reactive Ion Etching). The diaphragm with a sleeve is suitable for high reliable and easy bonding between the sleeve and the optical fiber. The light intensity change by the Fabry-Perot interferometer according to the pressure is increased by the improved DRIE method. The mass production method of the developed diaphragm will be useful to realize a low cost pressure sensor.