Development of an Electromagnetically Driven Optical MEMS Mirror with Functions of Z-Axis Vibration and X, Y Bi-Directional Tilting, and an Application to Low Coherent Optical Interferometer

Abstract

This paper presents development of an optical MEMS mirror device and an application to low coherence interferometry. This device can vibrate ±0.9μm along Z-axis under resonant frequency (5.24Vpp, 28.48kHz) for lock-in detection, and can tilt to X, Y bi-direction (Optical angle X:±10.6°/±10mA, Y:±5.2°/±10mA) for 2-D scanning and optical axis alignment by electromagnetic force between planar coils and a permanent magnet. In addition, developed MEMS mirror is embedded to a time-domain low coherent interferometer with a super luminescent diode (λc: 832nm, Δλ: 14.7nm) for optical axis alignment and lock-in detection, and the thickness and refractive index of a glass plate have been evaluated with low noise.