Development and Application of Composite Multi-Layered PZT Thin Films

Abstract

It is necessary to develop high performance microactuator in order to achieve it operating at a very low applied voltage. This paper describes the development of composite multi-layered PZT thin films for microactuator. The piezoelectric properties for 8 kinds of composite multi-layered PZT thin films are fabricated and studied. The ferroelectric polarization — electric (P-E) hysteresis loops of the films is also measured and discussed. According to the results of P-E hysteriesis loops, for these different composite films, most optimum composite form, i.e., sol-gel + sputter composite double-layered PZT thin films, which combined with conventional RF sputtering and sol-gel processing methods, exhibit excellent remnanent polarization and coercive fields of 14.87uC/cm² and 32.359KV/cm in 5V and 25.46uC/cm² and 41.94KV/cm in 7V, respectively. Moreover, as the applications of the composite double-layered PZT thin films, microactuators with different thickness diaphragm are developed using the most optimum piezoelectric property, i.e., sol-gel + sputter composite double-layered PZT thin films.