Dependence of Resonance Frequency on Diaphragm Dimensions in a Guided-Wave Optical Pressure Sensor

Abstract

The resonance frequencies of various diaphragms in glass-based guided-wave optical pressure sensors were examined experimentally. In this study, acoustic sound pressure was applied to six fabricated sensors with square diaphragms of different dimensions to evaluate frequency characteristics as well as resonance frequency. The measured resonance frequencies were proportional to the diaphragm thicknesses, and inversely proportional to the square of the side-length of diaphragms, as theoretically predicted.