IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Special Issue Letter
Development of Electrolyte-based Capacitive Level Sensor
Hideki MorinagaYoshinori Matsumoto
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2009 Volume 129 Issue 12 Pages 469-470

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Abstract
In this study, electrolyte-based level sensor has been fabricated on printed circuit board and evaluated with charge balanced C-V converter fabricated by 0.35μm CMOS process. Sector pattern sensor electrodes were fabricated and polydimethylsiloxane was used as package material. Propylene carbonate was injected in the bumpy surface sensor cavity of 10mm diameter and 2mm height, output voltage was changed with the inclination angle without the effect of vibration.
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© 2009 by the Institute of Electrical Engineers of Japan
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