Feasibility Study of Micro-Actuator Using Electro Conducting Polymers

Abstract

Recently, a soft actuator was developed using an electro conducting polymer and an ionic conducting polymer. Moreover, the stereolithography that uses femto second laser was researched as a method of multi-photon sensitized polymerization. In this proposal, we confirmed the fabrication of a 3D microstructure using a electro conducting polymer with a femto second laser, and its operation as an actuator. The diameter of the actuator core was 3.5μm, and its height was 12μm.